发明名称 POSITION DETECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To precisely specify a standard position of motion of a working part by highly precisely controlling a position of the working part on a working device demanded for precise working. SOLUTION: The position detection device to detect a relative position of a second measured part against a first measured part includes at least a base 11 having a first contact surface 15 to make contact with the first measured part, a movable part 12 arranged on the base 11 and having a second contact surface 16 to make contact with the second measured part, motion detection parts 21a, 21b to detect motion of the movable part 12 and a display part 22 to display a detection result on the motion detection parts 21a, 21b, and a distance L between the first contact surface 15 and the second contact surface 16 in a state where the movable part 12 does not work is set at a specified value.
申请公布号 JP2002166339(A) 申请公布日期 2002.06.11
申请号 JP20000361102 申请日期 2000.11.28
申请人 DISCO ABRASIVE SYST LTD 发明人 YOSHIDA TOSHIHARU
分类号 B23Q17/22;H01L21/301;(IPC1-7):B23Q17/22 主分类号 B23Q17/22
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