发明名称 |
High-performance integrated microactuator, particularly for a hard disk read/write transducer |
摘要 |
A microactuator comprises a stator element and a rotor element which are capacitively coupled. The rotor element comprises a suspended mass and a plurality of movable drive arms extending radially from the suspended mass and biased at a reference potential. The stator element comprises a plurality of first and second fixed drive arms associated with respective movable drive arms and biased at a first drive potential. A mechanical damping structure is formed by at least one movable damping arm extending radially from the suspended mass and by at least one first and one second fixed damping arm associated with the movable damping arm and biased at said reference potential, to dampen settling oscillations of the rotor element.
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申请公布号 |
US6404599(B1) |
申请公布日期 |
2002.06.11 |
申请号 |
US19990409584 |
申请日期 |
1999.09.30 |
申请人 |
STMICROELECTRONICS, S.R.L. |
发明人 |
VIGNA BENEDETTO |
分类号 |
G11B5/56;G11B5/55;G11B5/596;G11B21/10;H02N1/00;(IPC1-7):G11B21/24 |
主分类号 |
G11B5/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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