发明名称 |
PLASMA PROCESSING APPARATUS |
摘要 |
PURPOSE: To provide a plasma processing apparatus which is easy to control ion irradiation energy to a work, and plasma processing on the work is evenly performed at the time of plasma excitation by microwave. CONSTITUTION: A slot antenna plate 7 is disposed at the chamber inside 13 of a second dielectric 5 for irradiating microwave into the chamber inside 13. The antenna plate 7 comprises dielectric, and also has a slot 7a for inducing the microwave into the chamber inside 13.
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申请公布号 |
KR20020043446(A) |
申请公布日期 |
2002.06.10 |
申请号 |
KR20010075753 |
申请日期 |
2001.12.03 |
申请人 |
OHMI TADAHIRO;SHARP CORPORATION |
发明人 |
HIRAYAMA MASAKI;OHMI TADAHIRO;YAMAMOTO NAOKO;YAMAMOTO TATSUSHI |
分类号 |
H05H1/46;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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