COOLING APPARATUS FOR SEMICONDUCTOR

摘要

PURPOSE: A cooling apparatus for semiconductor is provided to emit efficiently heat generated from a semiconductor device by forming a double duct having a double air flow path. CONSTITUTION: A compressor(50) is used for compressing a refrigerant. A condenser(60) is used for condensing the refrigerant. An expansion valve(70) is connected with the condenser(60). A vaporizer(80) is connected with the expansion valve(70) and the compressor(50) in order vaporize the refrigerant. The vaporizer(70) is connected with a semiconductor device(10) or a semiconductor package by a double duct(41). The double duct(41) includes an inner duct and an outer duct. The inner duct provides an air flow path of the vaporizer(80) to the semiconductor device(10). The outer duct provides an air flow path of the semiconductor device(10) to the vaporizer(80).