发明名称 EPITAXIAL EDGE TERMINATION FOR SILICON CARBIDE SCHOTTKY DEVICES AND METHODS OF FABRICATING SILICON CARBIDE DEVICES INCORPORATING SAME
摘要 <p>Edge termination for a silicon carbide Schottky rectifier is provided by including a silicon carbide epitaxial region (16) on a voltage blocking layer (14) of the Schottky rectifier and adjacent a Schottky contact (18) of the silicon carbide Schottky rectifier. The silicon carbide epitaxial layer (16) may have a thickness and a doping level so as to provide a charge in the silicon carbide epitaxial region based on the surface doping of the blocking layer (14). The silicon carbide epitaxial region (16) may form a non-ohmic contact with the Schottky contact (18). The silicon carbide epitaxial region (16) may have a width of from about 1.5 to about 5 times the thickness of the blocking layer (14). Schottky rectifiers with such edge termination and methods of fabricating such edge termination and such rectifiers are also provided.</p>
申请公布号 WO2002045177(A2) 申请公布日期 2002.06.06
申请号 US2001047924 申请日期 2001.11.06
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