发明名称 ELECTRON BEAM GENERATING DEVICE, AND TESTING DEVICE
摘要 <p>An electron beam generating device, wherein a high-resistance film is formed on the outer surface of an insulator provided with a cathode for emitting thermions and a grid for collecting thermions and forming an electron beam to allow a feeble current to flow to the high-resistance film, thereby preventing the accumulation of thermions on the insulator and discharging. The upper portion of the high-resistance film connected with a chamber gives an approximate reference potential to the upper portion of the film, and the lower portion of the high-resistance film connected with the grid gives almost the same potential as that of the grid to the lower portion of the film to allow a feeble current to flow to the film. The prevention of accumulation of thermions on the insulator can prevent discharging, accurately control the current capacity of an electron beam, and give the electron beam generating device a longer service life.</p>
申请公布号 WO2002045123(P1) 申请公布日期 2002.06.06
申请号 JP2001010020 申请日期 2001.11.16
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