发明名称 METHOD AND APPARATUS FOR 2-D SPATIALLY RESOLVED OPTICAL EMISSION AND ABSORPTION SPECTROSCOPY
摘要 A multi-point detection method and system for analyzing a composition within an examination area. The system simultaneously acquires multi-dimensional distributions (e.g., two- or three-dimensional distributions) of plasma optical emissions at at least two wavelengths. Such diagnostics are useful for real-time spatially-resolved measurements of plasma electron temperature distributions and/or chemical species concentrations within a plasma processing chamber (50). Generally, the system analyzes/diagnoses the measurement of line-of-sight light emission or absorption in the plasma.
申请公布号 WO0244674(A1) 申请公布日期 2002.06.06
申请号 WO2001US43164 申请日期 2001.11.28
申请人 TOKYO ELECTRON LIMITED;MITROVIC, ANDREJ, S. 发明人 MITROVIC, ANDREJ, S.
分类号 G01N21/27;G01J3/443;G01J5/48;G01N21/71;H01J37/32;H05H1/00;(IPC1-7):G01J3/443;G01J3/00 主分类号 G01N21/27
代理机构 代理人
主权项
地址