发明名称 |
METHOD AND APPARATUS FOR 2-D SPATIALLY RESOLVED OPTICAL EMISSION AND ABSORPTION SPECTROSCOPY |
摘要 |
A multi-point detection method and system for analyzing a composition within an examination area. The system simultaneously acquires multi-dimensional distributions (e.g., two- or three-dimensional distributions) of plasma optical emissions at at least two wavelengths. Such diagnostics are useful for real-time spatially-resolved measurements of plasma electron temperature distributions and/or chemical species concentrations within a plasma processing chamber (50). Generally, the system analyzes/diagnoses the measurement of line-of-sight light emission or absorption in the plasma.
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申请公布号 |
WO0244674(A1) |
申请公布日期 |
2002.06.06 |
申请号 |
WO2001US43164 |
申请日期 |
2001.11.28 |
申请人 |
TOKYO ELECTRON LIMITED;MITROVIC, ANDREJ, S. |
发明人 |
MITROVIC, ANDREJ, S. |
分类号 |
G01N21/27;G01J3/443;G01J5/48;G01N21/71;H01J37/32;H05H1/00;(IPC1-7):G01J3/443;G01J3/00 |
主分类号 |
G01N21/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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