| 摘要 |
The carrier includes a retaining ring on its lower edge. It also has a holder, and is constructed to form first- and second separate chambers. The holder carries a plane surface section with first openings connecting with the first chamber. Second openings communicate with a second chamber. A membrane encloses the surface section of the holder. The membrane is or can be, spaced from the surface. It includes a number of third openings, which correspond with the first openings. An Independent claim is included for the corresponding method. |
