Production of a micromechanical structure used for integrated sensor arrays comprises applying an auxiliary layer and a membrane to a substrate to cover contact surfaces

摘要

Production of a micromechanical structure comprises preparing a substrate (1) having evaluation electronics or their components and provided with contact surfaces (2); applying an auxiliary layer (4) and a membrane (5) as a layer sequence to the substrate to cover the contact surfaces; inserting metal structures (6a) into the auxiliary layer so that they touch the contact surfaces; and selectively etching the auxiliary layer. An Independent claim is also included for the micromechanical structure produced. Preferred Features: A passivating layer (3) is applied to the substrate before the auxiliary layer is applied. A contact hole (5a) is etched through the layer sequence. The metal structures are made from tungsten.