发明名称 Wasserlösliche Photoresistzusammensetzung
摘要 A water-soluble photoresist composition is provided which comprises a water-soluble photosensitive composition containing casein and a water-soluble photosensitive agent and at least one kind of calcium salt of organic acid. The composition has excellent sensitivity, resolution, and etching resistance and can be used for the production of highly refined electronic components such as shadow masks, lead frame, etc.
申请公布号 DE69802055(T2) 申请公布日期 2002.06.06
申请号 DE1998602055T 申请日期 1998.06.24
申请人 FUJI CHEMICALS INDUSTRIAL CO., LTD. 发明人 UMEHARA, HIROSHI;ASANO, TAKATERU
分类号 G03F7/004;C08K5/098;C08L89/00;C23F1/00;G02B5/20;G03F7/04;H01J9/14;(IPC1-7):G03F7/04;G03C1/66 主分类号 G03F7/004
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