| 摘要 |
Capacitor electrodes (E1-E5) and a grounded reference electrode (E0) are formed on a substrate (20). The electrodes (E0-E5) are opposed to a movable electrode (40) that moves in the Z-axis direction as an externally operated detector member (30) moves in the Z-axis direction. The moving electrode (40) cooperates with the capacitor electrodes (E1-E5) and the reference electrode (E0) to form capacitors (C0-C5). The capacitors (C1-C5) are connected to the capacitor (C0) in series with respect to an external input signal, and the displacement of the detector member (30) is recognized by detecting the change in the capacitance value of the capacitors (C1-C5) due to the displacement of the detector member (30).
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