Probe card for testing an LSI operating on two power source voltages

摘要

A probe card includes low-voltage and high-voltage source pins and a plurality of signal pins. An EMI filter block is electrically connected between each source pin and a corresponding card terminal. Each EMI filter block includes a plurality of EMI filter elements connected in parallel. The low-voltage EMI filter element includes a three-terminal capacitor and a ferrite bead separately disposed, whereas the high-voltage EMI filter element includes a three-terminal capacitor having a built-in ferrite bead.