Apparatus for providing ozonated process fluid and methods for using same

摘要

The present invention is directed to apparatus and methods for wet processing electronic components using ozonated process fluids. In the apparatus and methods of the present invention, the ozonated process fluid is provided by an apparatus having a vessel for containing a stock fluid; an ozone source connected to the vessel for supplying ozone to the vessel; a fluid source in fluid communication with the vessel for supplying a fluid to the vessel; and a back-pressure regulator connected with an exhaust for regulating pressure within the vessel.