发明名称 IMAGE PROCESSING METHOD, IMAGE PROCESSING DEVICE, DETECTION METHOD, DETECTION DEVICE, EXPOSURE METHOD AND EXPOSURE SYSTEM
摘要 An image is acquired that contains a plurality of areas where two adjacent areas have mutually different image features (steps 111-114). Image features, for example, difference in texture in adjacent areas in the image thus obtained are used to analyze the image (step 115) and determine boundary information between the two adjacent areas (step 116). Shape information and position information in an attentional area in the image are detected based on the obtained boundary information to thereby detect the shape information, position information, optical characteristic information and the like of an object (step 117). As a result, the shape information, position information, optical characteristic information and the like of an object can be detected accurately.
申请公布号 WO0245023(A1) 申请公布日期 2002.06.06
申请号 WO2001JP10394 申请日期 2001.11.28
申请人 NIKON CORPORATION;YOSHIDA, KOUJI;MIMURA, MASAFUMI;SUGIHARA, TAROU 发明人 YOSHIDA, KOUJI;MIMURA, MASAFUMI;SUGIHARA, TAROU
分类号 G06T5/00;G06T7/40 主分类号 G06T5/00
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