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发明名称
Robotervorrichtung
摘要
申请公布号
DE69330968(T2)
申请公布日期
2002.06.06
申请号
DE19936030968T
申请日期
1993.04.22
申请人
APPLIED MATERIALS, INC.
发明人
GRUNES, HOWARD
分类号
B25J18/02;B25J9/06;B25J9/10;H01L21/673;(IPC1-7):B25J9/10
主分类号
B25J18/02
代理机构
代理人
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