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发明名称
Optisches Projektionssystem und Belichtungsapparat mit einem solchen
摘要
申请公布号
DE69526568(D1)
申请公布日期
2002.06.06
申请号
DE19956026568
申请日期
1995.09.15
申请人
NIKON CORP., TOKIO/TOKYO
发明人
MATSUZAWA, HITOSHI;KOBAYASHI, MISAKO;ENDO, KAZUMASA;SUENAGA, YUTAKA
分类号
G02B9/62;G02B13/22;G02B13/24;G03F7/20;(IPC1-7):G03F7/20
主分类号
G02B9/62
代理机构
代理人
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地址
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