| 摘要 |
A micromechanical device comprising a substrate, a movable member overlying the substrate, first and second microactuators carried by the substrate and a coupling assembly for connecting the first and second microactuators to the movable member. The first microactuator moves the movable member in a first substantially linear direction and the second microactuator moves the movable member in a second substantially linear direction substantially perpendicular to the first direction. The coupling assembly includes a first linkage coupled to the first microactuator and a second linkage coupled to the second microactuator. Each of the first and second linkage has a pivot for permitting the respective linkage to pivot when moving the movable member.
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