| 摘要 |
<p>To provide a vacuum pump (P) capable of effectively preventing product adhesion and accumulation inside the pump (P) while appropriately controlling the rotor temperature. A vacuum pump (P) includes a pump mechanism portion (A) for discharing gas in a vacuum vessel through rotation of a rotor installed in a pump case, and a heater (10) for warming the interior of the pump case, wherein parameters constituting factors determining the rotor temperature (pump ambient temperature, pump cooling water temperature, the kind and flow rate of pump exhaust gas, and pump exhaust pressure) are sent out, the heater set temperature t being determined from a database in a memory on the basis of these parameters. <IMAGE></p> |
