| 摘要 |
PURPOSE: A vacuum line connecting structure of a vertical equipment is provided to reduce losses due to frequent preventive maintenance by easily detecting a leakage possibility before occurring a leakage accident. CONSTITUTION: A vacuum line connecting structure of a vertical equipment comprises flanges(1) respectively formed at edge portions of a furnace port(7) of a furnace(4) and a vacuum line, clamps(2) fixed on the outer surfaces of the flanges(1), a locking part(6) applying pressure to the flanges(1) to the A-direction using the clamps(2), and an O-type ring(3) located between the flanges(1). At this point, pressure is applied to the flanges(1) by the locking part(6) so that the O-type ring(3) is also pressurized by the flanges(1), thereby sealing the connecting portion between the flanges(1) and the O-type ring(3).
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