| 摘要 |
A physical quantity detector apparatus detects a physical quantity in accordance with the displacement of a vibrator. The apparatus includes: a comb-like fixed electrode having a plurality of electrode fingers; and a comb-like movable electrode being displaceable together with the vibrator and having a plurality of electrode fingers. A voltage is applied between the fixed electrode and the movable electrode. A distance D1 from a distal end surface of each electrode finger of the movable electrode to a basal portion of the fixed electrode facing the distal end surface of each electrode finger of the movable electrode, a distance D2 from a distal end surface of each electrode finger of the fixed electrode to a basal portion of the movable electrode facing the distal end surface of each electrode finger of the fixed electrode, a maximum displacement A of the movable electrode in the direction of the axis of each electrode finger, a width w of each electrode finger of the movable electrode and of each electrode finger of the fixed electrode, and a distance d between each electrode finger of the movable electrode and an adjacent electrode finger of the fixed electrode in a direction of the width are set so as to satisfy a relationship of 1/(5dw)>{1/(D1-A)2}+{1/(D2-A)2}. |
