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发明名称
METHOD AND SYSTEM FOR SELECTIVE LINEWIDTH OPTIMIZATION DURING A LITHOGRAPHIC PROCESS
摘要
申请公布号
EP1210652(A2)
申请公布日期
2002.06.05
申请号
EP20010935527
申请日期
2001.05.16
申请人
SILICON VALLEY GROUP, INC.
发明人
GOVIL, PRADEEP, KUMAR;TSACOYEANES, JAMES
分类号
G03F7/20;G03F7/207;G03F9/00;G03F9/02;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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