发明名称 |
Electroless Ni-B plating liquid, electronic device and method for manufacturing the same |
摘要 |
<p>There is provided an electroless Ni-B plating liquid for forming, a Ni-B alloy film on at least part of the interconnects of an electronic device having an embedded interconnect structure, the electroless Ni-B plating liquid comprising nickel ions, a complexing agent for nickel ions, a reducing agent for nickel ions, and ammonums (NH4<+>). The electroless Ni-B plating liquid can lower the boron content of the resulting plated film without increasing the plating rate and form a Ni-B alloy film having an FCC crystalline structure.</p> |
申请公布号 |
EP1211334(A2) |
申请公布日期 |
2002.06.05 |
申请号 |
EP20010128173 |
申请日期 |
2001.11.27 |
申请人 |
EBARA CORPORATION;KABUSHIKI KAISHA TOSHIBA |
发明人 |
INOUE, HIROAKI;NAKAMURA, KENJI;MATSUMOTO, MORIJI;EZAWA, HIROKAZU;MIYATA, MASAHIRO;TSUJIMURA, MANABU |
分类号 |
C23C18/16;C23C18/34;C23C18/50;H01L21/288;H01L21/3205;H01L23/52;(IPC1-7):C23C18/50 |
主分类号 |
C23C18/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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