发明名称 Electroless Ni-B plating liquid, electronic device and method for manufacturing the same
摘要 <p>There is provided an electroless Ni-B plating liquid for forming, a Ni-B alloy film on at least part of the interconnects of an electronic device having an embedded interconnect structure, the electroless Ni-B plating liquid comprising nickel ions, a complexing agent for nickel ions, a reducing agent for nickel ions, and ammonums (NH4<+>). The electroless Ni-B plating liquid can lower the boron content of the resulting plated film without increasing the plating rate and form a Ni-B alloy film having an FCC crystalline structure.</p>
申请公布号 EP1211334(A2) 申请公布日期 2002.06.05
申请号 EP20010128173 申请日期 2001.11.27
申请人 EBARA CORPORATION;KABUSHIKI KAISHA TOSHIBA 发明人 INOUE, HIROAKI;NAKAMURA, KENJI;MATSUMOTO, MORIJI;EZAWA, HIROKAZU;MIYATA, MASAHIRO;TSUJIMURA, MANABU
分类号 C23C18/16;C23C18/34;C23C18/50;H01L21/288;H01L21/3205;H01L23/52;(IPC1-7):C23C18/50 主分类号 C23C18/16
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