Discharge processing device and method

摘要

Charge accumulated in a capacitor (2) is used to allow a processing current (Ipw) to flow between a target (W) and an electrode (P). When a diode (6) is turned on, a first dc power supply (3) is used to allow the processing current (Ipw) to flow between the target (W) and the electrode (P). In this state, after a lapse of a predetermined time, the current supply using the first dc power supply (3) is stopped, and an induced electromotive voltage, induced by two floating reactors (L 1 , L 2 ), is used to rapidly drop the processing current (Ipw) flowing between the target (W) and the electrode (P), while charging the capacitor (2).