发明名称 PHOTORESIST COMPOSITION FOR IMPROVING STAIN
摘要 PURPOSE: Provided is a photoresist composition for improving a pin stain, which contains a solvent containing 3-methoxy butyl acetate, n-butyl acetate, and gamma-butyrol lactone. CONSTITUTION: The photoresist composition contains the solvent containing 25-85wt% of 3-methoxy butyl acetate, 15-75wt% of n-butyl acetate, and 1-10wt% of gamma-butyrol lactone, a fluorine-based surfactant such as a fluorinated acrylic copolymer having a molecular weight of 3000-8000, and a polyester-based resin as an additive, such as poly vinyl methyl ether.
申请公布号 KR20020041866(A) 申请公布日期 2002.06.05
申请号 KR20000071489 申请日期 2000.11.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JU, JIN HO;KANG, SEONG CHEOL;LEE, YU GYEONG;NA, YUN JEONG;NOH, YEONG TAE;PARK, HONG SIK
分类号 G03F7/004 主分类号 G03F7/004
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