发明名称 |
PHOTORESIST COMPOSITION FOR IMPROVING STAIN |
摘要 |
PURPOSE: Provided is a photoresist composition for improving a pin stain, which contains a solvent containing 3-methoxy butyl acetate, n-butyl acetate, and gamma-butyrol lactone. CONSTITUTION: The photoresist composition contains the solvent containing 25-85wt% of 3-methoxy butyl acetate, 15-75wt% of n-butyl acetate, and 1-10wt% of gamma-butyrol lactone, a fluorine-based surfactant such as a fluorinated acrylic copolymer having a molecular weight of 3000-8000, and a polyester-based resin as an additive, such as poly vinyl methyl ether.
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申请公布号 |
KR20020041866(A) |
申请公布日期 |
2002.06.05 |
申请号 |
KR20000071489 |
申请日期 |
2000.11.29 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JU, JIN HO;KANG, SEONG CHEOL;LEE, YU GYEONG;NA, YUN JEONG;NOH, YEONG TAE;PARK, HONG SIK |
分类号 |
G03F7/004 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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