SYSTEMS AND METHODS FOR CHARACTERIZING AND CORRECTING CYCLIC ERRORS IN DISTANCE MEASURING AND DISPERSION INTERFEROMETRY,申请号EP20000913938-传众专利搜索

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发明名称	SYSTEMS AND METHODS FOR CHARACTERIZING AND CORRECTING CYCLIC ERRORS IN DISTANCE MEASURING AND DISPERSION INTERFEROMETRY
摘要
申请公布号	EP1169613(A4)	申请公布日期	2002.06.05
申请号	EP20000913938	申请日期	2000.03.15
申请人	ZYGO CORPORATION	发明人	HILL, HENRY, A.
分类号	G01B9/02;G03F7/20;H01L21/027;(IPC1-7):G01B9/02	主分类号	G01B9/02
代理机构		代理人
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