| 摘要 |
There is provided a gas analyzing apparatus capable of minimizing gas remaining by integrating gas switching apparatuses into one and capable of analyzing impurities of ppb level to sub-ppb level contained in various kinds of high-purity gases efficiently and accurately. The gas analyzing apparatus comprises an analyzer introduction passage 22 for introducing a sample gas supplied from a sample gas source 11 into an analyzer 12 via an analyzer introduction valve 22V; a separator introduction passage 23 diverging from a first side passage of the analyzer introduction valve 22V for introducing a sample gas into a separator 13 via a separator introduction valve 23V; a separator flowing out passage 24 for introducing the sample gas flowing out from the separator 13 into a second side passage of the analyzer introduction valve 22V via a separator flowing-out valve 24V; and a gas switching apparatus to be such formed that when the analyzer introduction valve 22V is opened, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be closed, and when the analyzer introduction valve 22V is closed, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be opened.
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