| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder with a shielding plate, which forms a uniform plating without increasing operation processes and jumboizing the whole plating equipment. SOLUTION: The substrate holder having substrate pressing swinging plates in front and back, comprises; in the first, providing the shielding plate on the substrate holder; in the second, making the pressing plates of front and back from a non-conductive resin; in the third, burying a conducting bar in the pressing plates; in the fourth, providing an electric conduction pin connected to the conducting bar on the pressing plates of front and back so as to abut with another inner face; and in the fifth, providing a mechanism for clamping the pressing plates of front and back. The substrate holder with the shielding plate according to the above structure is characterized by that the conducting bar and the electric conduction pin are provided on both pressing plates of front and back.
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