发明名称 Processing method of device and processing method of slider
摘要 A working method capable of implementing various types of devices such as a slider available with high reliability without causing malfunction or the like due to contamination during an actual use is provided by solving a problem of deterioration in profile precision and a problem of contamination resulting from roughness of a cut surface or chipping.A wire saw comprising a wire having a diameter greater than a width of a portion cut by a first cutting step, namely, a width of a cut groove is brought into contact with the cut groove of a bar. While the wire saw is slid in a longitudinal direction, the bar is sliced across the overall thickness of the bar along the thickness of the bar. Thus, while the bar is cut, a final cut surface formed by cutting is smoothed.
申请公布号 US6398623(B1) 申请公布日期 2002.06.04
申请号 US20000538298 申请日期 2000.03.30
申请人 TDK CORPORATION 发明人 FUKUROI OSAMU;FUJII RYUJI
分类号 B24B27/06;B24B21/00;G11B5/31;G11B5/60;G11B7/00;H01L21/301;(IPC1-7):B24B1/00 主分类号 B24B27/06
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