| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a cylindrical metal target with a bottom (a cylinder with bottom), which has little difference in sputter characteristics among the bottom, a side face a curved face, and the like, and which forms a uniform film, because of leaving no machined structure due to metal spinning in the cylindrical target, though the cylindrical target is formed by metal spinning. SOLUTION: The method for manufacturing the metal target of the cylindrical configuration with the bottom, of which the inner curved surface is sputtered, is characterized by metal spinning to form it and subsequent heat treatment to control a fine structure of the metal target.
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