| 摘要 |
PROBLEM TO BE SOLVED: To provide a high rigidity and low thermal expansion ceramic having a small thermal expansion coefficient in the range of -1 to 1 ppm/K and a high Young's modulus of 140 GPa or more at 20+/-5 deg.C and its manufacturing method. SOLUTION: This method for manufacturing the high rigidity and low thermal expansion ceramic having the thermal expansion coefficient in the range of -1 to 1 ppm/K and the Young's modulus of 140 GPa or more at 20+/-5 deg.C characteristically comprises mixing a high rigidity and low thermal expansion ceramic which contains lithium aluminosilicate expressed by general formula of Li2O.Al2O3.nSiO2 (n=2-8) whose thermal expansion coefficient is in the range of -8 to 0 ppm/K at 20+/-5 deg.C and SiC and has the ceramic's thermal expansion coefficient of -1 to 1 ppm/K and the young's modulus of 140 GPa or more at 20+/-5 deg.C with a SiC powder and a powder of lithium aluminosilicate expressed by the same general formula and the same coefficient of -8 to 0 ppm/K at 20+/-5 deg.C, forming and sintering at 1,270-1,530 deg.C. |
