SEMICONDUCTOR MICROACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor microactuator allowing reducing electric power consumption comparing with the past. SOLUTION: A needle 2 is placed inside a frame type supporting base plate 1 such that the needle 2 can be shifted to a depth direction of the supporting base plate 1. The supporting base plate 1 and the needle 2 are connected via an arm piece to shift the needle 2 by thermal expansion/contraction. In an extending direction of the arm piece, a width Lb of a heat insulation part 4b on the needle 2 side is widened than a width La of a heat insulation part, 4a on the supporting base plate 1 side.