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发明名称
摘要
申请公布号	JP2002516459(A)	申请公布日期	2002.06.04
申请号	JP20000550128	申请日期	1999.02.24
申请人		发明人
分类号	H05B33/26;H01L51/50;H01L51/52;(IPC1-7):H05B33/26;H05B33/14	主分类号	H05B33/26
代理机构		代理人
主权项
地址

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