| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a production management system for film formed substrates, which can perform 100% inspection of thin films on the film formed substrates without lowering equipment throughput, and which can rapidly revise an operation of a film forming method. SOLUTION: The production management system comprises a sputtering device 34 for forming a metal thin film 12a on a glass substrate 12, a sheet- resistance measuring means for calculating a sheet resistance by irradiating the substrate with a magnetic flux of a magnetic field from one side of the metal thin film 12a, a computer 26 for control and operation, which judges a film forming process as good or bad, based on a comparison between the calculated sheet resistance and a reference value, cell computers 33 and 33a for managing a manufacturing process of the film formed substrate, and a host computer 32 for managing the whole manufacturing process of the film formed substrate by controlling the cell computers 33 and 33a. The host computer 32 comprises sending a signal for controlling operation to the sputtering device 34 through the cell computer 33, based on the judgment result by the computer 26 for control and operation.</p> |
