发明名称 FERRITE THIN FILM FOR HIGH FREQUENCY AND METHOD OF PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To develop a means of producing a Y type hexagonal crystal system ferrite thin film for high frequency. SOLUTION: The Y type hexagonal crystal system ferrite thin film with a C axis of the crystal oriented vertically to a film face is produced by the following step: forming a Y type ferrite composition film on the surface of a precious metal with coating method by the use of a viscous solution comprising a metal and organic complex which is formed by having as a main component Fe+3 ion and as a subcomponent at least one transition metal ion selected from the group consisting of Fe2+, Co2+, Ni2+, Zn2+, Cu2+ or Mn2+, and Ba2+, or at least one metal ion selected from the group consisting of Sr2+, Ca2+ or Pb2+, and thereafter sintering the Y type ferrite composition film at >=750 deg.C.
申请公布号 JP2002160924(A) 申请公布日期 2002.06.04
申请号 JP20000355065 申请日期 2000.11.21
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 TAKADA JUN;FUJII TATSUO;NAKANISHI MAKOTO
分类号 C01G49/00;C23C18/12;H01F10/20;H01F41/16;(IPC1-7):C01G49/00 主分类号 C01G49/00
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