发明名称 |
Defect detection system and method |
摘要 |
Detecting a defect in the sample is accomplished by photoacousticly exciting acoustic longitudinal, surface Rayleigh, and shear waves at a first point on a near surface of a sample; photoacoustically detecting acoustic waves at a second point spaced from the excitation first point for intercepting shear waves reflected from the far surface of the sample at approximately the angle of maximum shear wave propagation; and detecting the energy level of the intercepted reflected shear waves representative of the flaw in the sample. |
申请公布号 |
AU3072102(A) |
申请公布日期 |
2002.06.03 |
申请号 |
AU20020030721 |
申请日期 |
2001.11.13 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
SHI-CHANG WOOH |
分类号 |
G01N29/04;G01N29/24;G01N29/44 |
主分类号 |
G01N29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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