发明名称 Defect detection system and method
摘要 Detecting a defect in the sample is accomplished by photoacousticly exciting acoustic longitudinal, surface Rayleigh, and shear waves at a first point on a near surface of a sample; photoacoustically detecting acoustic waves at a second point spaced from the excitation first point for intercepting shear waves reflected from the far surface of the sample at approximately the angle of maximum shear wave propagation; and detecting the energy level of the intercepted reflected shear waves representative of the flaw in the sample.
申请公布号 AU3072102(A) 申请公布日期 2002.06.03
申请号 AU20020030721 申请日期 2001.11.13
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 SHI-CHANG WOOH
分类号 G01N29/04;G01N29/24;G01N29/44 主分类号 G01N29/04
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