发明名称 METHOD FOR COLLECTING METAL ELEMENTS OF WASTED SOLUTION AFTER ETCHING OF SEMICONDUCTOR DEVICE
摘要 PURPOSE: A collection method of metal ions of a wasted solution is provided to simplify collection processes and to reduce a reaction chemical and wastes by using an ammonia as a ligand. CONSTITUTION: A compound composed of a nickel and an ammonia is formed by neutralizing a mixed solution having solute Ni and Fe ions in a strong acidity state using ammonia. At this time, the compound in neutralization is more easily solute than the Ni in the strong acidity and the pH is controlled in the range 5 to 9 using a hydrochloric acid or a caustic soda, while it is difficult to make a compound composed of the Fe ion using ammonia as a ligand, especially, the solubility of the Fe ion is considerably decreased in neutralization. In result, the metal ions are easily collected by simple processes of a filtering or a cleansing.
申请公布号 KR20020041373(A) 申请公布日期 2002.06.01
申请号 KR20020024032 申请日期 2002.05.01
申请人 SEO, YEONG SEOK 发明人 SEO, YEONG SEOK
分类号 H01L21/306;(IPC1-7):H01L21/306 主分类号 H01L21/306
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