| 摘要 |
PURPOSE: A sputtering apparatus is provided to automatically control a pressure of a gas injection/exhaust pipe by using an electromotive valve. CONSTITUTION: A sputtering apparatus comprises a chamber(10) performing a sputtering, a gas injection/exhaust pipe(32) injecting a gas to the chamber(10), a first valve(26) injecting the gas to the gas injection/exhaust pipe(32), a second valve(24) exhausting the gas from the chamber(10) to the injection/exhaust pipe(32), an electromotive valve(40) for controlling the pressure of the gas injection/exhaust pipe(32) connected between the chamber(10) and the gas injection/exhaust pipe(32), and a controller(42) controlling the chamber(10), the first valve(26), the second valve(24) and the electromotive valve(40). By using the electromotive valve(40), the pressure of the gas injection/exhaust pipe(32) is automatically controlled.
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