| 摘要 |
PURPOSE: An apparatus and a method for irradiating ultraviolet rays are provided to irradiate uniformly the ultraviolet rays on a workpiece by using dielectric excimer lamps. CONSTITUTION: A lamp portion(11) is formed with a plurality of dielectric excimer lamps. The plural dielectric excimer lamps are arranged in parallel. A power control portion(12) turns on or off the plural dielectric excimer lamps. A cooling portion(13) has a structure for cooling the plural dielectric excimer lamps and improving the irradiating amount of the plural dielectric excimer lamps. A carrier portion(14) carries a rectangular workpiece(W) such as a glass substrate to the horizontal direction. The carrier portion(14) includes a loading plate for loading the rectangular workpiece(W). A carrier control portion(15) controls a carrying speed, a carrying distance, and a carrying operation of the rectangular workpiece(W) of the carrier portion(14).
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