| 摘要 |
PURPOSE: A spin dryer is provided to prevent damages of a wafer cassette, a spin dryer, or a wafer due to a collision of a wafer cassette in a cradel with a wafer completed with wet cleansing progressing to the cradel by previously detecting the wafer cassette in the cradel. CONSTITUTION: A spin dryer comprises cradels(122) fixed with a wafer cassette having a wafer, a turning force generator(140) circulating the cradels(122) with the defined number of revolutions, a controlling unit(190) controlling the turning force generator(140), and a wafer cassette detection unit(180) transmitting a detecting signal detecting the existence of the wafer cassette in the cradels(122) to the controlling unit(190). The wafer cassette detection unit(180) is made of a proximity sensor, photo-sensor, or supersonic sensor.
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