METHOD OF PRODUCING SILANES

摘要

The invention relates to a method of producing silane or hydrochlorosilanes by disproportionation of a higher chlorinated hydrochlorosilane or a mixture of said hydrochlorosilanes in the presence of a catalyst. Before the catalyst is used, it is a) washed with ultrapure water in one or more steps, b) transferred in the water-moist state to the reactor in which the disproportionation is to proceed, c) treated in the reactor with boiling methanol or rinsed with anhydrous methanol, and d) the methanol is removed from the catalyst by evacuating and/or stripping it with an inert gas. The invention further relates to a method for treating disproportionation catalysts.