SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PURPOSE: To obtain a semiconductor integrated circuit in which both current trimming and laser trimming can be effected by mounting a TaN film as a trimming element. CONSTITUTION: A metallization layer 16 adhering to a TaN layer 15 functioning as a barrier metal thereof is partially removed to obtain a single TaN layer which is utilized as a trimming resistor R10 functioning as a fuse.