METHOD FOR FABRICATING RF CERAMIC RESONATOR

摘要

PURPOSE: A method for fabricating an RF ceramic resonator is provided to simplify a fabricating process and improve the productivity by performing a relatively simple process. CONSTITUTION: A plurality of polarized electrodes(21a,21b) are formed at both ends of a sub wafer(21) in order to polarize the sub wafer(21). A resist layer(23) is formed on a center portion of the polarized sub wafer(21) by using a screen printing method. A dry process for the sub wafer(21) is performed. The resist is formed with positive resist or thermosetting epoxy resin. A deposition layer(22) is formed on both ends of the sub wafer(21). The resist layer(23) is removed by performing an ultrasonic cleaning process. A plurality of chips are formed by slicing off the sub wafer(21).