发明名称 |
Stability of ion beam generated alignment layers by surface modification |
摘要 |
A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.
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申请公布号 |
US2002063830(A1) |
申请公布日期 |
2002.05.30 |
申请号 |
US20000726951 |
申请日期 |
2000.11.30 |
申请人 |
CALLEGARI ALESSANDRO C.;CHAUDHARI PRAVEEN;DOANY FUAD E.;DOYLE JAMES P.;GALLIGAN EILEEN A.;GLOWNIA JAMES H.;HOUGHAM GARETH G.;LACEY JAMES A.;LIEN SHUI-CHIH;LU MINHUA;ROSENBLUTH ALAN E.;YANG KEI-HSIUNG |
发明人 |
CALLEGARI ALESSANDRO C.;CHAUDHARI PRAVEEN;DOANY FUAD E.;DOYLE JAMES P.;GALLIGAN EILEEN A.;GLOWNIA JAMES H.;HOUGHAM GARETH G.;LACEY JAMES A.;LIEN SHUI-CHIH;LU MINHUA;ROSENBLUTH ALAN E.;YANG KEI-HSIUNG |
分类号 |
B01J19/12;C01B31/02;C23C14/48;C23C14/58;G02F1/1337;(IPC1-7):G02F1/133 |
主分类号 |
B01J19/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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