| 摘要 |
A semiconductor device comprises a first insulating layer having a first copper wiring, a second insulating layer having a via of copper communicating with the first copper wiring, a third insulating layer having a second copper communicating with the via, and wherein either of the insulating layers is made of a material containing boron and nitrogen as a main component. Diffusion of copper into the insulating layer is prevented and, at the same time, wiring capacitance is reduced so that a high speed operation of the semiconductor device is enabled.
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