发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>A semiconductor device comprising an n-channel conductivity type field-effect transistor having a channel forming region in a first region in one major surface of a semiconductor substrate, and a p-channel conductivity type field-effect transistor having a channel forming region in a second region different from the first region in the one major surface of the semiconductor substrate, wherein the inner stress generated in the channel forming region of the n-channel conductivity type field-effect transistor is different from the inner stress generated in the channel forming region of the p-channel conductivity type field-effect transistor. The inner stress generated in the channel forming region of the n-channel conductivity type field-effect transistor is a tensile stress and the inner stress generated in the channel forming region of the p-channel conductivity type field-effect transistor is a compressive stress.</p>
申请公布号 WO2002043151(P1) 申请公布日期 2002.05.30
申请号 JP2001005633 申请日期 2001.06.29
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