发明名称 LIGHT MODULATION DEVICE AND SYSTEM
摘要 A light modulation element, device, and system (10) is discussed. The light modulation element includes three electrodes (14, 16, 26), a rigid member (20), and a mirror (22). The rigid member (20) is connected between the three electrodes (14, 16, 26) so that the first and second electrodes (14, 16) are on one side and the third electrode (26) is on the opposite side of the rigid member (20). The mirror (22) is attached to the rigid member (20) so that it can move therewith. The rigid member (20) moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror (22) is positioned in a predetermined position responsive to the state of the rigid member (20).
申请公布号 WO0242825(A1) 申请公布日期 2002.05.30
申请号 WO2001US43560 申请日期 2001.11.20
申请人 BALL SEMICONDUCTOR, INC. 发明人 MEI, WENHUI;CHAN, KIN, FOONG;SIM, DONG, YOUN
分类号 G02B6/35;G02B26/08;G03F7/20;(IPC1-7):G02B26/00 主分类号 G02B6/35
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