摘要 |
A light modulation element, device, and system (10) is discussed. The light modulation element includes three electrodes (14, 16, 26), a rigid member (20), and a mirror (22). The rigid member (20) is connected between the three electrodes (14, 16, 26) so that the first and second electrodes (14, 16) are on one side and the third electrode (26) is on the opposite side of the rigid member (20). The mirror (22) is attached to the rigid member (20) so that it can move therewith. The rigid member (20) moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror (22) is positioned in a predetermined position responsive to the state of the rigid member (20).
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