发明名称 Carrier transporting apparatus, method of transporting a carrier and transporting apparatus
摘要 A carrier transporting apparatus comprises a thermostat for testing devices loaded on a carrier, and the carrier is carried out from the thermostat through an opening formed in the thermostat. A shutter is provided for opening and closing the opening, and a carrier guide is integrated with the shutter. As the shutter is opened for carrying out the carrier from the test section, the carrier guide is moved to a waiting position where the carrier guide does not obstruct the carrier. As the shutter is closed after the carrier is carried out, the carrier guide is moved to a guiding position where the carrier guide guides the carrier in a direction to cross the direction in which the carrier is carried out from the thermostat. Thereafter, the carrier guide guides the carrier so that the carrier is transported in the cross direction.
申请公布号 US2002063557(A1) 申请公布日期 2002.05.30
申请号 US20010985609 申请日期 2001.11.05
申请人 ANDO ELECTRIC CO. LTD. 发明人 UCHINO YOSHIAKI;ARAKAWA OSAMU
分类号 G01R31/26;G01R31/01;G01R31/28;H01L21/677;(IPC1-7):G01R1/00 主分类号 G01R31/26
代理机构 代理人
主权项
地址