| 摘要 |
PURPOSE: A shadow mask having a thermal expansion absorbing structure is provided to suppress landing error of an electron beam by absorbing thermal expansion due to electron beam impact. CONSTITUTION: A shadow mask having a thermal expansion absorbing structure comprises many holes, through-parts(521,531) and half etching parts(523,533). Each of the many holes has a through-hole(511) from the top to the bottom of the shadow mask and a protrusion(512) at the center of the through-hole(511). The through-parts(521,531) are formed at the area where the holes does not exist, and have protrusions(522,532). The half etching parts(523,533) are arranged at the outer boundaries of the through-parts(521,531). The through-parts(521,531) and the half etching parts(523,533) are formed to be spaced from each other at an upper surface and a lower surface. The half etching parts(523,533) are formed as circles, ovals or rectangles.
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