| 摘要 |
PURPOSE: A durability examining apparatus of O-ring is provided to improve reliance of the durability data of the O-ring by examining the durability under real using-circumstance. CONSTITUTION: An examination driving part(32) comprises an airtightness chamber(11), a driving examination pipe(28) having a fixing groove(28-1) of an examination O-ring(10), a sub-driving examination pipe(29) having a fixing groove(29-1), a linear guide(6) supporting the sub-driving examination pipe(29) so as to control the distance between the driving examination pipe(28) and the sub-driving examination pipe(29), and a motor(9) fixed on the outer of the airtightness chamber(11) to drive the driving examination pipe(28). A toxic gas supplier(30) provides a toxic gas of a gas supply line(16) to the airtightness chamber(11) through an electron valve controlled by a gas supply controller(15) or a controlling valve(14) of a by-pass line(16-1). A vacuum formation part(31) makes vacuum state in the airtightness chamber(11) by two-step decompression treatment using sequentially a rotary pump(26) and an oil diffusion pump(22). A halogen heater(13) apply heat to the inner of the airtightness chamber(11). A sensor(12) is installed to detect a toxic gas, a temperature and a pressure in the airtightness chamber(11). A controller(27) is installed to control the toxic gas supplier(30), the vacuum formation part(31), halogen heater(13), and the motor(9), so that the circumstance of the airtightness chamber(11) is made as a process chamber of semiconductor equipment.
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