发明名称 |
Antireflective porogens |
摘要 |
Disclosed are organo polysilica dielectric materials having low dielectric constants useful in electronic component manufacture are disclosed along with methods of preparing the porous organo polysilica dielectric materials. Also disclosed are methods of forming electronic devices containing such porous organo polysilica dielectric materials without the use of antireflective coatings.
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申请公布号 |
US2002065331(A1) |
申请公布日期 |
2002.05.30 |
申请号 |
US20010974072 |
申请日期 |
2001.10.11 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
ZAMPINI ANTHONY;GALLAGHER MICHAEL K. |
分类号 |
G03F7/004;C08F20/18;C08F230/08;C08F290/06;C08L33/04;C08L55/00;C08L83/02;C08L83/04;C09D5/32;C09D183/04;H01L21/027;H01L21/312;H01L21/316;H05K1/03;H05K3/00;(IPC1-7):C08J9/26 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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